"Technological process for the fabrication of a MEMS microswitch actuated ..."

Davide Balma (2011)

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type: Book or Thesis

metadata version: 2023-03-29

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Davide Balma:
Technological process for the fabrication of a MEMS microswitch actuated by a PZT thin film. Polytechnic University of Turin, Italy, 2011

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