"Measurement and Simulation of Boron Diffusivity in Strained Si1 ..."

K. G. Rajendran, Wim Schoenmaker (2001)

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DOI: 10.1155/2001/23186

access: open

type: Journal Article

metadata version: 2023-05-08

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K. G. Rajendran, Wim Schoenmaker:
Measurement and Simulation of Boron Diffusivity in Strained Si₁ -_xGe_x Epitaxial Layers. VLSI Design 13(1-4): 317-321 (2001)

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