"Surface Evolution During Semiconductor Processing."

Ganesh Rajagopalan, Vadali Mahadev, Timothy S. Cale (1998)

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DOI: 10.1155/1998/62125

access: open

type: Journal Article

metadata version: 2023-05-08

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Ganesh Rajagopalan, Vadali Mahadev, Timothy S. Cale:
Surface Evolution During Semiconductor Processing. VLSI Design 6(1-4): 379-384 (1998)

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