"Plasma Process Modeling for Integrated Circuits Manufacturing."

M. Meyyappan, T. R. Govindan (1998)

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DOI: 10.1155/1998/27636

access: open

type: Journal Article

metadata version: 2023-05-08

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M. Meyyappan, T. R. Govindan:
Plasma Process Modeling for Integrated Circuits Manufacturing. VLSI Design 6(1-4): 409-412 (1998)

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