"Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning."

Minoo Mirsaeedi, Andres J. Torres, Mohab H. Anis (2014)

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DOI: 10.1109/TVLSI.2013.2265309

access: closed

type: Journal Article

metadata version: 2020-03-11

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Minoo Mirsaeedi, Andres J. Torres, Mohab H. Anis:
Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning. IEEE Trans. Very Large Scale Integr. Syst. 22(5): 1170-1174 (2014)

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