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"Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition ..."
FaJun Yang et al. (2017)
- FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou, ZhiWu Li:
Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints. IEEE Trans. Syst. Man Cybern. Syst. 47(3): 502-516 (2017)
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