"Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm ..."

Yan Qiao et al. (2018)

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DOI: 10.1109/TSMC.2016.2600583

access: closed

type: Journal Article

metadata version: 2021-02-05

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Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu:
Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. IEEE Trans. Syst. Man Cybern. Syst. 48(4): 622-636 (2018)

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