"Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment ..."

Baoying Huang et al. (2024)

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DOI: 10.1109/TSMC.2024.3409727

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type: Journal Article

metadata version: 2024-10-22

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Baoying Huang, TaiRan Song, NaiQi Wu, Yan Qiao:
Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements. IEEE Trans. Syst. Man Cybern. Syst. 54(10): 5912-5924 (2024)

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