"A Model for Wafer Fabrication Dynamics in Integrated Circuit Manufacturing."

Judith E. Dayhoff, Robert W. Atherton (1987)

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DOI: 10.1109/TSMC.1987.289336

access: closed

type: Journal Article

metadata version: 2020-05-20

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Judith E. Dayhoff, Robert W. Atherton:
A Model for Wafer Fabrication Dynamics in Integrated Circuit Manufacturing. IEEE Trans. Syst. Man Cybern. 17(1): 91-100 (1987)

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