"Modeling and analysis of semiconductor manufacturing systems with degraded ..."

MuDer Jeng, Xiaolan Xie (2001)

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DOI: 10.1109/70.964659

access: closed

type: Journal Article

metadata version: 2020-05-19

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MuDer Jeng, Xiaolan Xie:
Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons. IEEE Trans. Robotics Autom. 17(5): 576-588 (2001)

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