"Cut Optimization for Redundant Via Insertion in Self-Aligned Double ..."

Youngsoo Song et al. (2019)

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DOI: 10.1145/3355391

access: closed

type: Journal Article

metadata version: 2019-11-15

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Youngsoo Song, Daijoon Hyun, Jingon Lee, Jinwook Jung, Youngsoo Shin:
Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning. ACM Trans. Design Autom. Electr. Syst. 24(6): 61:1-61:21 (2019)

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