"An Effective Chemical Mechanical Polishing Fill Insertion Approach."

Chuangwen Liu et al. (2016)

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DOI: 10.1145/2886097

access: closed

type: Journal Article

metadata version: 2018-11-06

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Chuangwen Liu, Peishan Tu, Pangbo Wu, Haomo Tang, Yande Jiang, Jian Kuang, Evangeline F. Y. Young:
An Effective Chemical Mechanical Polishing Fill Insertion Approach. ACM Trans. Design Autom. Electr. Syst. 21(3): 54:1-54:21 (2016)

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