"Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning ..."

Xingquan Li, Wenxing Zhu (2017)

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DOI: 10.1145/3084683

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type: Journal Article

metadata version: 2024-05-07

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Xingquan Li, Wenxing Zhu:
Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning Lithography. ACM Trans. Design Autom. Electr. Syst. 23(1): 6:1-6:23 (2017)

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