"Neural-net computing for interpretation of semiconductor film optical ..."

Gwang Hoon Park et al. (1996)

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DOI: 10.1109/72.508926

access: closed

type: Journal Article

metadata version: 2018-11-14

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Gwang Hoon Park, Yoh-Han Pao, Boris Igelnik, Kurt G. Eyink, Steven R. LeClair:
Neural-net computing for interpretation of semiconductor film optical ellipsometry parameters. IEEE Trans. Neural Networks 7(4): 816-829 (1996)

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