"Deep reinforcement learning-assisted extended state observer for ..."

Zhu Ma, Tianhong Pan (2024)

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DOI: 10.1177/01423312241229492

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type: Journal Article

metadata version: 2024-09-08

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Zhu Ma, Tianhong Pan:
Deep reinforcement learning-assisted extended state observer for run-to-run control in the semiconductor manufacturing process. Trans. Inst. Meas. Control 46(12): 2300-2312 (2024)

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