"Thickness Measurement of Oxide and Carbonaceous Layers on a ..."

Lulu Zhang et al. (2017)

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DOI: 10.1109/TIM.2016.2634678

access: closed

type: Journal Article

metadata version: 2024-10-16

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Lulu Zhang, Naoki Kuramoto, Yasushi Azuma, Akira Kurokawa, Kenichi Fujii:
Thickness Measurement of Oxide and Carbonaceous Layers on a ²⁸Si Sphere by XPS. IEEE Trans. Instrum. Meas. 66(6): 1297-1303 (2017)

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