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"Density Evaluation of Silicon Thermal-Oxide Layers on Silicon Crystals by ..."

Atsushi Waseda, Kenichi Fujii (2007)

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DOI: 10.1109/TIM.2007.890781

access: closed

type: Journal Article

metadata version: 2020-06-08

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Atsushi Waseda, Kenichi Fujii:
Density Evaluation of Silicon Thermal-Oxide Layers on Silicon Crystals by the Pressure-of-Flotation Method. IEEE Trans. Instrum. Meas. 56(2): 628-631 (2007)

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