"Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors ..."

Hongbo Wang, Wei Li, Zhihua Feng (2015)

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DOI: 10.1109/TIM.2015.2406053

access: closed

type: Journal Article

metadata version: 2020-06-08

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Hongbo Wang, Wei Li, Zhihua Feng:
Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation. IEEE Trans. Instrum. Meas. 64(9): 2557-2564 (2015)

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