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"Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning ..."
Chek Sing Teo, Kok Kiong Tan, Ser Yong Lim (2008)
- Chek Sing Teo, Kok Kiong Tan, Ser Yong Lim:
Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control. IEEE Trans. Instrum. Meas. 57(2): 413-419 (2008)
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