"Uncertainty Analysis Method Including Influence of Probe Alignment on ..."

Ryo Sakamaki, Masahiro Horibe (2019)

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DOI: 10.1109/TIM.2019.2907733

access: closed

type: Journal Article

metadata version: 2020-06-08

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Ryo Sakamaki, Masahiro Horibe:
Uncertainty Analysis Method Including Influence of Probe Alignment on On-Wafer Calibration Process. IEEE Trans. Instrum. Meas. 68(6): 1748-1755 (2019)

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