"A silicon micromachined flow sensor using thermopiles for heat transfer ..."

Seiji Oda et al. (2003)

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DOI: 10.1109/TIM.2003.815997

access: closed

type: Journal Article

metadata version: 2020-06-08

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Seiji Oda, Mitsuyoshi Anzai, Shoichi Uematsu, Kenzo Watanabe:
A silicon micromachined flow sensor using thermopiles for heat transfer measurements. IEEE Trans. Instrum. Meas. 52(4): 1155-1159 (2003)

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