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"An Optical Interferometry Based MEMS Accelerometer Applicable to ..."
Cheng Li et al. (2022)
- Cheng Li, Bo Yang, Xiang Zheng, Zhenyu Sun, Luqiang Zhou, Xin Huang, Xin Guo:
An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement. IEEE Trans. Instrum. Meas. 71: 1-10 (2022)
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