"Stability of microelectromechanical devices for electrical metrology."

Jukka Kyynäräinen, Aarne S. Oja, Heikki Seppä (2001)

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DOI: 10.1109/19.982934

access: closed

type: Journal Article

metadata version: 2020-06-08

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Jukka Kyynäräinen, Aarne S. Oja, Heikki Seppä:
Stability of microelectromechanical devices for electrical metrology. IEEE Trans. Instrum. Meas. 50(6): 1499-1503 (2001)

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