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"Contactless Measurements of Resistivity of Semiconductor Wafers Employing ..."

Jerzy Krupka, Janina Mazierska (2007)

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DOI: 10.1109/TIM.2007.903647

access: closed

type: Journal Article

metadata version: 2020-06-08

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Jerzy Krupka, Janina Mazierska:
Contactless Measurements of Resistivity of Semiconductor Wafers Employing Single-Post and Split-Post Dielectric-Resonator Techniques. IEEE Trans. Instrum. Meas. 56(5): 1839-1844 (2007)

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