"Data-Driven Virtual Metrology and Retraining Systems for Color Filter ..."

Chih-Hung Jen, Shu-Kai S. Fan, Yu-Yu Lin (2022)

> Home

Details and statistics

DOI: 10.1109/TIM.2022.3207807

access: closed

type: Journal Article

metadata version: 2022-10-18

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tim/JenFL22
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tim/JenFL22
Chih-Hung Jen, Shu-Kai S. Fan, Yu-Yu Lin:
Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing. IEEE Trans. Instrum. Meas. 71: 1-12 (2022)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.