"Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe."

Qiang-Xian Huang et al. (2024)

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DOI: 10.1109/TIM.2024.3381248

access: closed

type: Journal Article

metadata version: 2024-05-04

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Qiang-Xian Huang, Jian Xu, Xianzhi Qin, Liansheng Zhang, Rongjun Cheng, Hongli Li, Chaoqun Wang, Rui-Jun Li:
Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe. IEEE Trans. Instrum. Meas. 73: 1-9 (2024)

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