"A silicon-etched probe for 3-D coordinate measurements with an uncertainty ..."

Han Haitjema, Wouter Pril, P. H. J. Schellekens (2001)

> Home

Details and statistics

DOI: 10.1109/19.982938

access: closed

type: Journal Article

metadata version: 2020-06-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tim/HaitjemaPS01
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tim/HaitjemaPS01
Han Haitjema, Wouter Pril, P. H. J. Schellekens:
A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm. IEEE Trans. Instrum. Meas. 50(6): 1519-1523 (2001)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.