"Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, ..."

George C. Giakos et al. (2006)

> Home

Details and statistics

DOI: 10.1109/TIM.2006.884110

access: closed

type: Journal Article

metadata version: 2020-06-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tim/GiakosMSSFO06
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tim/GiakosMSSFO06
George C. Giakos, A. Medithe, S. Sumrain, Srinivas Sukumar, Luay Fraiwan, A. Orozco:
Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures. IEEE Trans. Instrum. Meas. 55(6): 2126-2131 (2006)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.