"A Precision Dose Control Circuit for Maskless E-Beam Lithography With ..."

Sazia A. Eliza et al. (2011)

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DOI: 10.1109/TIM.2010.2090691

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - https://dblp.org/rec/journals/tim/ElizaIRBBBEG11
Sazia A. Eliza, Syed Kamrul Islam, Touhidur Rahman, Nora D. Bull, Benjamin J. Blalock, L. R. Baylor, M. Nance Ericson, W. L. Gardner:
A Precision Dose Control Circuit for Maskless E-Beam Lithography With Massively Parallel Vertically Aligned Carbon Nanofibers. IEEE Trans. Instrum. Meas. 60(4): 1132-1140 (2011)

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