"Micromechanical voltage reference using the pull-in of a beam."

Edmond Cretu, Luís Alexandre Rocha, Reinoud F. Wolffenbuttel (2001)

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DOI: 10.1109/19.982935

access: closed

type: Journal Article

metadata version: 2020-10-26

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Edmond Cretu, Luís Alexandre Rocha, Reinoud F. Wolffenbuttel:
Micromechanical voltage reference using the pull-in of a beam. IEEE Trans. Instrum. Meas. 50(6): 1504-1507 (2001)

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