"Multimode Air-Coupled Excitation of Micromechanical Structures."

Cetin Cetinkaya et al. (2008)

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DOI: 10.1109/TIM.2008.924934

access: closed

type: Journal Article

metadata version: 2020-06-08

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Cetin Cetinkaya, Liang Ban, Ganesh Subramanian, Ilgaz Akseli:
Multimode Air-Coupled Excitation of Micromechanical Structures. IEEE Trans. Instrum. Meas. 57(11): 2457-2461 (2008)

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