"Embedded Capacitive Displacement Sensor for Nanopositioning Applications."

Svetlana Avramov-Zamurovic et al. (2011)

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DOI: 10.1109/TIM.2011.2126150

access: closed

type: Journal Article

metadata version: 2020-06-08

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Svetlana Avramov-Zamurovic, Nicholas G. Dagalakis, Rae Duk Lee, Jae-Myung Yoo, Yong-Sik Kim, Seung-Ho Yang:
Embedded Capacitive Displacement Sensor for Nanopositioning Applications. IEEE Trans. Instrum. Meas. 60(7): 2730-2737 (2011)

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