"Analytical Model-Based Multiphysics Optimization of a Nanopositioning ..."

Haiyue Zhu, Tat Joo Teo, Chee Khiang Pang (2018)

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DOI: 10.1109/TIE.2017.2714132

access: closed

type: Journal Article

metadata version: 2020-05-22

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Haiyue Zhu, Tat Joo Teo, Chee Khiang Pang:
Analytical Model-Based Multiphysics Optimization of a Nanopositioning Electromagnetic Actuator. IEEE Trans. Ind. Electron. 65(1): 478-487 (2018)

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