"New actuation method for push-pull electrostatic MEMS comb drive."

Tao Zhao, Yung C. Liang (2003)

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DOI: 10.1109/TIE.2003.819567

access: closed

type: Journal Article

metadata version: 2020-05-22

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Tao Zhao, Yung C. Liang:
New actuation method for push-pull electrostatic MEMS comb drive. IEEE Trans. Ind. Electron. 50(6): 1337-1339 (2003)

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