"A High-Resolution Optical Displacement Detection Method for Piezoelectric ..."

Haixiang Zhan et al. (2020)

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DOI: 10.1109/TIE.2019.2962414

access: closed

type: Journal Article

metadata version: 2023-04-19

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Haixiang Zhan, Wu Zhou, Longqi Ran, Huijun Yu, Bei Peng, Rui Hao:
A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage. IEEE Trans. Ind. Electron. 67(12): 10897-10904 (2020)

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