"Development of a Digital-Convolution-Based Process Emulator for ..."

Hsiu-Ming Yeh, Kuo-Shen Chen (2009)

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DOI: 10.1109/TIE.2008.2006030

access: closed

type: Journal Article

metadata version: 2021-10-14

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Hsiu-Ming Yeh, Kuo-Shen Chen:
Development of a Digital-Convolution-Based Process Emulator for Three-Dimensional Microstructure Fabrication Using Electron-Beam Lithography. IEEE Trans. Ind. Electron. 56(4): 926-936 (2009)

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