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"Piezoelectric-Piezoresistive Coupling MEMS Sensors for Measurement of ..."

Fen Xue et al. (2020)

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DOI: 10.1109/TIE.2019.2893837

access: closed

type: Journal Article

metadata version: 2022-01-19

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Fen Xue, Jun Hu, Yue Guo, Guowei Han, Yong Ouyang, Shan X. Wang, Jinliang He:
Piezoelectric-Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range. IEEE Trans. Ind. Electron. 67(1): 551-559 (2020)

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