"Serial-Kinematic Hybrid Electromagnetic-Piezoelectric AFM Scanner for ..."

Xiangyuan Wang et al. (2025)

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DOI: 10.1109/TIE.2024.3398667

access: closed

type: Journal Article

metadata version: 2024-11-30

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Xiangyuan Wang, Bocheng Yu, Lingwen Tan, Yixuan Meng, Qi Yu, Linlin Li, Zhiwei Zhu, LiMin Zhu:
Serial-Kinematic Hybrid Electromagnetic-Piezoelectric AFM Scanner for High-Throughput Raster Scanning. IEEE Trans. Ind. Electron. 72(1): 1003-1013 (2025)

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