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"A MicroPirani Pressure Sensor Based on the Tungsten Microhotplate in a ..."
Jiaqi Wang et al. (2009)
- Jiaqi Wang, Zhenan Tang, Jinfeng Li, Fengtian Zhang:
A MicroPirani Pressure Sensor Based on the Tungsten Microhotplate in a Standard CMOS Process. IEEE Trans. Ind. Electron. 56(4): 1086-1091 (2009)
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