"A Compact Cantilever-Type Ultrasonic Motor With Nanometer Resolution: ..."

Liang Wang et al. (2021)

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DOI: 10.1109/TIE.2020.2965481

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type: Journal Article

metadata version: 2024-10-06

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Liang Wang, Yuntian Guan, Yingxiang Liu, Jie Deng, Junkao Liu:
A Compact Cantilever-Type Ultrasonic Motor With Nanometer Resolution: Design and Performance Evaluation. IEEE Trans. Ind. Electron. 68(1): 734-743 (2021)

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