"A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With ..."

Ziqiang Qu et al. (2024)

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DOI: 10.1109/TIE.2023.3294597

access: closed

type: Journal Article

metadata version: 2024-04-27

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Ziqiang Qu, Hao Ouyang, Wen Xiong, Qiangwei Xu, Yuan Wang, Huafeng Liu:
A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. IEEE Trans. Ind. Electron. 71(6): 6418-6426 (2024)

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