"High-Precision XY Stage Motion Control of Industrial Microscope."

Lihong Idris Lim, Dazhi Yang (2019)

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DOI: 10.1109/TIE.2018.2838102

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type: Journal Article

metadata version: 2025-01-19

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Lihong Idris Lim, Dazhi Yang:
High-Precision XY Stage Motion Control of Industrial Microscope. IEEE Trans. Ind. Electron. 66(3): 1984-1992 (2019)

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