"Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large ..."

Paolo Frigerio et al. (2023)

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DOI: 10.1109/TIE.2022.3174235

access: closed

type: Journal Article

metadata version: 2023-01-31

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Paolo Frigerio, Luca Molinari, Andrea Barbieri, Marco Zamprogno, Gianluca Mendicino, Nicoló Boni, Giacomo Langfelder:
Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range. IEEE Trans. Ind. Electron. 70(4): 4217-4225 (2023)

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