"Measurements of a fabricated micro mirror using a lateral-effect ..."

Seok-Whan Chung, Yong-Kweon Kim (1998)

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DOI: 10.1109/41.735329

access: closed

type: Journal Article

metadata version: 2020-05-22

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Seok-Whan Chung, Yong-Kweon Kim:
Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode. IEEE Trans. Ind. Electron. 45(6): 861-865 (1998)

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