"The LIGA technique and its potential for microsystems-a survey."

Walter Bacher, Wolfgang Menz, Jürgen Mohr (1995)

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DOI: 10.1109/41.464604

access: closed

type: Journal Article

metadata version: 2020-05-22

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Walter Bacher, Wolfgang Menz, Jürgen Mohr:
The LIGA technique and its potential for microsystems-a survey. IEEE Trans. Ind. Electron. 42(5): 431-441 (1995)

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