"Analysis of fitness functions for electron-beam lithography simulation and ..."

Franck Robin, Esteban Moreno Soriano (2004)

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DOI: 10.1109/TEVC.2004.834198

access: closed

type: Journal Article

metadata version: 2020-05-12

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Franck Robin, Esteban Moreno Soriano:
Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization. IEEE Trans. Evol. Comput. 8(5): 506-511 (2004)

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