"MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and ..."

Ronald Grundbacher, Jochen E. Hoetzel, Christofer Hierold (2009)

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DOI: 10.1109/TE.2008.919807

access: closed

type: Journal Article

metadata version: 2020-04-16

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Ronald Grundbacher, Jochen E. Hoetzel, Christofer Hierold:
MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a Single-Axis Accelerometer. IEEE Trans. Educ. 52(1): 82-91 (2009)

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