"Feedback control of MOCVD growth of submicron compound semiconductor films."

Sean C. Warnick, Munther A. Dahleh (1998)

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DOI: 10.1109/87.654877

access: closed

type: Journal Article

metadata version: 2020-06-08

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Sean C. Warnick, Munther A. Dahleh:
Feedback control of MOCVD growth of submicron compound semiconductor films. IEEE Trans. Control. Syst. Technol. 6(1): 62-71 (1998)

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