"Optimal pulse shaping for plasma processing."

Tyrone L. Vincent, Laxminarayan L. Raja (2004)

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DOI: 10.1109/TCST.2003.821961

access: closed

type: Journal Article

metadata version: 2020-06-08

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Tyrone L. Vincent, Laxminarayan L. Raja:
Optimal pulse shaping for plasma processing. IEEE Trans. Control. Syst. Technol. 12(1): 75-86 (2004)

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