"Iterative control of dynamics-coupling-caused errors in piezoscanners ..."

Szuchi Tien, Qingze Zou, Santosh Devasia (2005)

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DOI: 10.1109/TCST.2005.854334

access: closed

type: Journal Article

metadata version: 2020-06-08

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Szuchi Tien, Qingze Zou, Santosh Devasia:
Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation. IEEE Trans. Control. Syst. Technol. 13(6): 921-931 (2005)

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